MAE 268/MATS 254, MEMS Materials,
Fabrication, & Applications
FINAL CLASS PRESENTATIONS:
(1)
Aerodynamics of Micromechanical
flight: J. Caldwell and J. Schwank
(2)
Mirasol
Display technology: E.N. Bettis and J. Saylor
(3)
MEMS rigid diaphragm
speaker: S. Maghy, T. Havard.
S. Sehrawat
(4)
Magnetic microactuators for liver collagen removal: D.Y. Ashur and S. Ananda
Time and Location: Tuesday & Thursday, 11 – 12:20 pm, Room: SSB 106
Instructors: Prof. Prab Bandaru, Room 258, EBU 2, phone: (858) 534 – 5325, e-mail: pbandaru@ucsd.edu
Prof. Sungho Jin, Room 256, EBU 2, phone: (858) 534-4903, e-mail: jin@ucsd.edu
Prof. Frank Talke, 303, CMRR, phone: (858) 534-3646, e-mail: ftalke@ucsd.edu
This course covers the principles of Micro-Electro-Mechanical Systems (MEMS) fabrication, materials involved, actuation principles utilized, and the fundamentals of MEMS operation in relation to stresses and deformation. Novel device applications, future trends and Nano-Electro-Mechanical (NEMS) systems are also discussed.
Of interest to: Anybody interested in frontier science and technology, and how human engineered systems compare with biological mechanisms.
Course objectives: Engineering systems such as motors, valves etc., are being scaled down to micron sizes, a fraction of the size of a single strand of human hair (!), and are currently used in automobiles (e.g., crash sensors in airbags) and biological systems (e.g., neural probes and micro-analysis systems). As size decreases new regimes in mechanics, thermodynamics and fluid flow will become relevant. We will discuss how far we are from micro-robots that can perform surgery when let loose in our bodies, and how much room there is at the bottom.
Textbooks: MEMS and NEMS are very rapidly expanding fields and textbooks find it hard to keep up! Interesting articles and forefront advances will be talked about in class.
The following books are good references and have been posted on reserve in the Science & Engineering Library. They should also be available in the bookstore.
Microsystem design, S.D.Senturia, Kluwer (2001)
- The nitty gritty of designing a MEMS element and evaluating its performance. Not too much emphasis
on materials/ fabrication methods
Fundamentals of Microfabrication, M. Madou, CRC Press, (2002)
THE book for students interested in fabrication. A good survey of the MEMS and applications.
Micromachined transducers Sourcebook, G. Kovacs, McGraw Hill, (1998)
A classic reference for everything you wanted to know about sensors. Good historical emphasis.
An Introduction to MEMS Engineering, Nadim Maluf, Artech, (2000)
- A good introduction to what MEMS is all about, quite basic
Evaluation & Grading
Homework 15 %, Project 30 %
Midterm exam 20 % Final exam 35 %
Home work: Problem sets will be assigned regularly, and collected the next week during class.
No late homework will be accepted, except with prior permission from the instructor. Solutions to the homework sets will be posted on the class website.
Lecture policy: Attendance is expected, and class participation encouraged. All the material presented in the class is fair game on the quizzes and examinations.
Examinations: Exams will be closed book, only a formula sheet will be allowed for all examinations. The Final will be comprehensive.
Tentative exam dates: Mid-term Thursday, April 30, 2009
Final Tuesday,
June 9, 2009 (11:30 – 2:30)
Academic Integrity:
While mutual discussion is allowed and encouraged, the final solutions on the homework/project must be the student’s own.